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 Double-ended
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Tubular double-ended and single ended quartz halogen lamps are high-power infrared heat sources. Supports centre the filament within the tube for sturdiness. The lamps are of the halogen type, which means that blackening of the tube and consequently infrared depreciation negligible during life, which ensures very high stability for semiconductor processing. High radiant energy concentrations are provided by IRK lamps. Full power is reached within a few hundred milliseconds of switching on. The power of the lamps is fully controllable, the required radiation level can be adjusted instantly between 0 and 100%.This means that silicon wafer temperature can be modulated accurately according to the process specification over a wide range.
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Process reproducibility is achieved by providing exactly the same heat dose to the silicon wafer every time.
Applications
Philips Lighting offers a range of Quartz Infrared Halogen Lamps as heat sources for semiconductor manufacturing processes: - Epitaxy - CVD (Chemical Vapor Deposit) - RTP (Rapid Thermal Process) - Ion implant annealing - Etching Philips lamps fit in most of the equipment used in the semiconductor industry
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